> semiconductors at the atomic level
This is definitely being achieved in some respects today. We certainly have the metrology needed to work with this scale now.
I would also add quantum computers to your list. I realize the tortured path this idea has gone down, but even non-exponential speedups like Grover's algorithm could have a major impact on the economics of large-scale optimization & search. IBM is releasing a computer this year that allegedly has 16k+ qubit support.