Cant answer the question and my knowledge is only from 'one interested' but from how long (~20 years) it took to build the current EUV source and how complicated the alternatives look this is for sure no easy feat.

Can recommend [1] as the title say about the light source. Very interesting even for a non professional (and [2] as on high level overview of the machine and [3] as longer documentation inside ASML).

[1] https://www.youtube.com/watch?v=5Ge2RcvDlgw "The Extreme Engineering of ASML’s EUV Light Source"

[2] https://www.youtube.com/watch?v=f0gMdGrVteI "The Extreme Physics Pushing Moore’s Law to the Next Level"

[3] https://www.youtube.com/watch?v=zQu_TMgHO98 "ASML's Secret: An exclusive view from inside the global semiconductor giant"