You can use a big accelerator as a EUV light source. The SLAC beamline was once used to test the concept. Medium sized (160m circumference) synchrotrons have been suggested.[2] One appears to be under construction in China.
A plasma wakefield accelerator is a proposed way to shrink a powerful accelerator down to a more manageable size. Maybe. There's a project underway to use about a third of the 2-mile long SLAC beamline in this mode.
ASML made zapping a droplet of molten tin with lasers work as an EUV source. That's a nightmare. This approach may or may not be better. It involves zapping a high-pressure gas with lasers.
All the known ways to do this are insanely expensive and look more like physics experiments than production equipment.
A clean light source, where you put electricity in and get EUV out, would be easier to work with. There was talk of "table top synchrotrons" a few years back. One startup built one, although it was more like garage-sized.
[1] https://www.cambridge.org/core/journals/high-power-laser-sci...
[2] https://pubmed.ncbi.nlm.nih.gov/35228673/
[3] https://www6.slac.stanford.edu/news/2020-10-12-slac-starts-n...