"""If, for instance, having made a small lathe with a pantograph, we find its lead screw irregular – more irregular than the large-scale one – we could lap the lead screw against breakable nuts that you can reverse in the usual way back and forth until this lead screw is, at its scale, as accurate as our original lead screws, at our scale.
We can make flats by rubbing unflat surfaces in triplicates together – in three pairs – and the flats then become flatter than the thing you started with. Thus, it is not impossible to improve precision on a small scale by the correct operations. So, when we build this stuff, it is necessary at each step to improve the accuracy of the equipment by working for awhile down there, making accurate lead screws, Johansen blocks, and all the other materials which we use in accurate machine work at the higher level. We have to stop at each level and manufacture all the stuff to go to the next level – a very long and very difficult program. Perhaps you can figure a better way than that to get down to small scale more rapidly."""
Many ideas contributed to the modern process of 5nm lithography, but having flat surface plates whose precision is determined by the correct application of operations rather than an external standard has turned out to be one of the most profound.
Now, of course, you can buy a granite surface place with accuracy exceeding almost anything available 100 years ago, for $30. And there are youtube videos of flat surface aficinados who scrape their own.