I was just reading about this in a tech magazine, couple of startups also trying other techniques of interest, one of them using helium atoms for the lithography. This uses pretty close to x-ray wavelengths of light. Amazing feats of engineering taking place in this crazy world of ours.
Articles like this are why I come back to HN. Interesting technically, kinda novel and fun. Got me thinking about datasets that may be sitting on old HDD, got TBs of old video and audio from projects of past. Blogs like this help point the way.. Now if only I had the time..