I‘d probably call it the most complex commercially available machine. You can‘t buy a Space Shuttle, or an LHC. You can buy a TSMC lithography machine, and it‘ll be delivered to you in much the same way as other equipment.

Also, I think the axis it‘s probably most complex on is precision of individual parts and of their combination. Arguably chips themselves are more precise as their 'parts' are so small, but they are much more homogeneous compared to the EUV machine, where tons of different materials and part sizes need to combine.