An orthogonal question is what makes sense as a measure of complexity. One could use "number of parts" (whatever that means): NASA says the Space Shuttle has 2.5 million moving parts, while the article says the ASML machine has over 100,000 components. Another issue is how to deal with composition. A TSMC fab is obviously more complex than a lithography machine since it contains a lithography machine, but maybe the fab doesn't count as a "machine". Another issue is complexity vs parts: a 32-Gb DRAM chip has about 68 billion transistors and capacitors, but it's not extremely complex, since it's mostly the same thing repeated. And then there's the question of distribution: can you really count the Internet as one "thing"?