Chip making is one of the unique tech which is at the farthest end of humanity's engineering capabilities. Not just ASML, its entire supply chain is full of extremely precise components which 1 or 2 companies have mastered. e.g. the mirrors used are so precise that if scaled to size of earth tallest mountain will be 1cm high. Sure China will make it one day and maybe will beat rest of the world, it is not given to be in near future.