A recent CCC talk covered the current state of EUV lithography (really well): https://youtu.be/NdppYYfQJgg?t=1393 This timecode has rendering of the ASML machine in action. (edit: the same one madspindel posted, oops! The rest of the talk def worth a watch)
And even that official video is massively underplaying how fast these steppers (and in turn: all the mechanics around the mirrors) work. Look at this video at ~44:20 to get a better feeling