Note that 14nm processes (which are quite old by now) are not the same as 14nm feature sizes. I'm not sure what these machines are capable of, since some details may well be lost in translation in this kind of publication. And I'm only an interested enthusiast, I don't work in the field directly.

But towards the end of the article they talk of targeting 8nm line width in 2028, which is impressive. Maybe this time around NIL actually becomes real for high-end processes?