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ASML machines can presumably be rendered largely worthless remotely through firmware (or by being forced to operate out of design spec for a while, causing physical damage), and I have to assume TSMC/Taiwan/US have that stuff pre-rigged (physically or software), too.

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These are some of the cleanest rooms on the face of the planet. These processes are ultra-sensitive to any kind of physical disturbance, dirt, etc. These individual machines are hand-assembled by ASML on-location.

TSMC under peacetime conditions has issues obtaining acceptable yields on this equipment. In an armed conflict, there will be no operation at all, much less one that requires a Stuxnet-style attack to shut down.

A Stuxnet redux.

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