ASML are solving a small subset of physics problems: how to project extremely small features. TSMC are solving many more physics problems: how to structure layers of doped silicon into transistors, how to structure those transistors into logic gates, and those logic gates into functional blocks. This is why silicon process is not just a matter of capital investment, and why nobody is going to show up overnight with 10 billion dollars and change things. It’s not that TSMC are the only ones with a big bag of cash to give ASML.
ASML's machines are very impressive, but they're just one piece of that puzzle. And ASML themselves rely on collaborators like Zeiss.
This idea that it's all just capital and others are reluctant to invest otherwise they could duplicate TSMC simply false.
GlobalFoundries' Fab 1 can do 1 nm, and its Fab 8 is capable of doing 14 nm:
> https://en.wikipedia.org/w/index.php?title=GlobalFoundries&o...