There's been a lot of work on nanoelectronics. For example, some scientists recently announced at a semiconductor conference that they had found a way to bypass the diffraction limit completely, making 2nm features with a 650nm laser. Similarly, I know an engineer who worked on a massively-parallel electron-beam-based etching device, which could also be applied similarly at very small node sizes. There's a billion other technical challenges, but there's been a lot of progress in making features on the molecular level.
If anything, this is better than expected: EUV has had some serious problems over the past few years, yet its delay hasn't stopped the next few nodes.
Moore's law doesn't require that shrinkage continuing, though, as there are other technologies available. Memristors in particular may allow scaling faster than Moore's law would otherwise predict.