indeed, and i wonder if you could elide the vacuum entirely with a noble gas (presuming the vacuum is required to avoid reactions with atmospheric gases)
If they're processing in a vacuum to avoid N2 and/or O2 and/or H2O chemistry, then a dry inert gas might be useful.
Heating above 100°C to drive off H2O, followed by a purge with dry Ar might give the desired result without needing a vacuum system.