It seems to me like maybe we should be referring to the resolution in atoms at this point. If and when lithography is accurate to the individual atom, that's the absolute end of miniaturization, right? (Unless maybe we start super-cooling chips to make them contract..? but that's not lithography.)

Current "nm" values do not measure anything. No part of your "5nm" chip is 5nm in length/width/depth/etc. It's been a decade since that, why start now?

Just a nitpick. The plank length is not the smallest discrete measure of length. It's not even known whether our universe has discrete or continuous space at all.

Intel seems to want to use angstroms as a unit (instead of intel 2(nm), it will be intel 20a, don’t know if an angstrom is a tenth of a nm.