If it were total destruction, my money would be on artillery. Wikipedia says the range for modern artillery is 15-300km, which gives a very wide radius in which artillery could be hidden (ignoring local geography). If the artillery was preemptively dialed into the fab, it could be fired at very short notice, and I don't think anyone would be able to stop the shells mid-flight.
That being said I'm sure the real risk is the Chinese capturing the machines-- it is acknowledged they are about 15 years behind the state of the art.
Just knowing something is possible is often a great breakthrough to advancing understanding
Just look at history with operation Paperclip where German rocket scientists surrendered to the Allies. Those German scientists formed the core of NASA.
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