I am pretty shocked but I guess ASML delivers by 747. [1][2] But they do seem to know what they're doing. :)

"The current generation of EUV machines are already, to put it bluntly, kind of bonkers. Each one is roughly the size of a bus and costs $150 million. It contains 100,000 parts and 2 kilometers of cabling. Shipping the components requires 40 freight containers, three cargo planes, and 20 trucks."

[1] https://technical-news.net/euv-lithography-asml-delivers-100... [2] https://www.wired.com/story/asml-extreme-ultraviolet-lithogr...