I would guess that raw materials can be transported by road or rail. Access to a waterway is sometimes needed for very heavy indivisible parts (not sure if this is commons for fabs) but that is unlikely to be a regular occurrence. Just drive it down the interstate with a police escort at 2am.
"The current generation of EUV machines are already, to put it bluntly, kind of bonkers. Each one is roughly the size of a bus and costs $150 million. It contains 100,000 parts and 2 kilometers of cabling. Shipping the components requires 40 freight containers, three cargo planes, and 20 trucks."
[1] https://technical-news.net/euv-lithography-asml-delivers-100... [2] https://www.wired.com/story/asml-extreme-ultraviolet-lithogr...
Fascinating
It is not common. Semiconductor equipment is generally designed to be sent via air freight and assembled on site.
Some of the supporting operations (water and air purification plants, on-site chemical production, LN2 production, etc) may require some large parts but that's a case-by-case basis and probably avoidable.