You can get arbitrarily small at the cost of exploding count of masks. I.E. double patterning needs 2X masks, but quad patterning needs 8X. Octuple patterning is completely impractical.
Using a smaller wavelength is kind of useless for the optical lithography, as below this photons will make too many secondary electrons which will reduce the effective resolution. This is the reason X-ray lithography went nowhere.
This is why the ultimate limit of 157nm lithography was also not so far away from EUV. Also somewhere in between 25nm-30nm
This is also why some people suggest resurrecting 157nm — getting nearly same half pitch without maintenance, and expensive tooling of EUV.
Basically everything about the process is absurd, not sure why pushing on the light source is less feasible then any of the other knobs
At some point it’s switching from ‘lots of wiffle balls in a stream’ to ‘high power machine gun fire’, and the physical properties of everything involved become very limiting.
>The required utility resources are significantly larger for EUV compared to 193 nm immersion, even with two exposures using the latter. Hynix reported at the 2009 EUV Symposium that the wall plug efficiency was ~0.02% for EUV, i.e., to get 200-watts at intermediate focus for 100 wafers-per-hour, one would require 1-megawatt of input power
The optical train is also tough. 13nm is getting close to soft x-rays, and photons that hot don't like reflecting, and the optics are rapidly degraded by exposure light:
>EUV collector reflectivity degrades ~0.1-0.3% per billion 50kHz pulses (~10% in ~2 weeks), leading to loss of uptime and throughput [...] Due to the use of EUV mirrors which also absorb EUV light, only a small fraction of the source light is finally available at the wafer. There are 4 mirrors used for the illumination optics, and 6 mirrors for the projection optics. The EUV mask or reticle is itself an additional mirror. With 11 reflections, only ~ 2% of the EUV source light is available at the wafer.
I wonder if that is some kind of cultural shift that is taking place that started around 2009, or if it's always been like this and I just never noticed.
BMW model numbers used to more or less accurately reflect engine sizes, not anymore, it's just numbers now.
2G, 3G, 4G used to mean something, not anymore.
I could add a remark about the federal reserve, but... I'll just stay away from that. Don't want to be too edgy/turn this into a political discussion (I just think it's interesting from a cultural perspective).
It's like we collectively decided that "it's just numbers, man."
People with no scruples realized it's easier/cheaper to confuse and persuade people something is better than actually producing something better and that conventional wisdom was wrong.
It's a lot easier to invest in propoganda that convinced improved perceived value than actual value. It's win-win, the consumer thinks they're happy and the producer doesn't have to deal with the mess of hurdles in reality to continue to make money. Conventional wisdom says people are smart and will see through your snake oil, meanwhile, empirical data says people will drink the snake oil if you tell them it's from the fountain of youth.
So, yeah. This is nothing new. Marketers gonna market.
Did they really, though?
2G was accurately labeled (in my experience), sure, but I remember when Verizon started relabeling their HSPA+ (3G) stuff as 4G in my hometown. Not even "4G LTE" (which allowed them to get away with it since it's not actually 4G), they just straight up called it 4G on my Motorola Droid Turbo. When I rooted it, I found out exactly what it was connected with and learned it was all a lie. (When I actually did experience real 4G, the speed difference was shocking.)
AT&T relabeled their 4G network as 5G fairly early on. [0] Then, Verizon decided to copy them. [1] But this wasn't a trend that started with 5G.
[0]: https://www.theverge.com/2020/5/20/21265048/att-5g-e-mislead...
[1] https://telecoms.com/505584/verizon-told-to-stop-lying-about...
> I wonder if that is some kind of cultural shift that is taking place that started around 2009, or if it's always been like this and I just never noticed.
> BMW model numbers used to more or less accurately reflect engine sizes, not anymore, it's just numbers now.
When was that and which number? Just looking at the 7 series (surely you didn't mean that number) the E32 build between 86 and 94 had engine sizes between 3 and 5 liters.
> 2G, 3G, 4G used to mean something, not anymore.
So what did the G mean? AFAIK it was generation, but that's a very vague term. Just look at human generations, people are born continously, so you could have two people who are the same age but technically a generation apart because one had very old parents and the other has very young parents/grandparents are they the same generation?
> I could add a remark about the federal reserve, but... I'll just stay away from that. Don't want to be too edgy/turn this into a political discussion (I just think it's interesting from a cultural perspective).
> It's like we collectively decided that "it's just numbers, man."
Effects are moderately visible and have to be counteracted at 5nm. I heard some rumours about 7nm, but cannot confirm any countermeasures were taken to avoid quantum effects.
It should be noted that "3nm" is now purely for commercial reasons and has no relationship to the size of transistors on board.
Gate leakage is the phenomenon of quantum tunneling through the gate dielectric barrier and started appearing as gate dielectrics became thinner and thinner. Gate leakage was mitigated by moving to higher k dielectrics (from silicon dioxide, SiO2, to more exotic materials that include other elements such as Hafnium).
Higher k dielectrics allow for the same capacitance per unit area and channel control with a thicker physical gate compared to plain SiO2, reducing gate leakage. This technology change came along with metal gates (which used to be polysilicon) and were a combined advance that Intel incorporated a few years before before TSMC, IIRC circa 2008.
This is a circuit designer's perspective. Someone who actually understands device physics and material properties can chime in to correct me.