During the time I worked at ASML, I spoke to some of the engineers about things like this.
Apparently, that equipment rarely gets sold off or excessed. Those machine keep producing for years and years and decades even, for the same companies, in the same fabs, in the same location. Even as they get older and older, they’re still so profitable to keep running that it almost never makes sense to turn them off or sell them to someone else.
They were actually quite proud of the fact that they had lots of old hardware in the field that was still running and producing wafers for the same customer so many years later. They were a little taken aback by what it cost them to keep those old systems around themselves, so that they could provide support for them in the field. But that’s what the customers were paying for, and so that’s what ASML did.