The genuine problem with tin plasma laser is its power efficiency. An early adopter runs can bare with 0.02% energy efficiency, but imagine, say, a few 20 line fabs and their power consumption.
Another very important advantage of this design would be getting a more stable, easily tunable, and more narrowband light source. Tin plasma has around 1nm deviation in its spectrum, while a cyclotron can get to picometres on an arbitrary wavelength.
And with all above, you get a supremely tempting option to try diffractive optics, and do away with all geometry imposes nonsense of EUV reflective optics...