If you want that I recommend to look at semiwiki [0] and wikichip [1][2]

[0] https://www.semiwiki.com/forum/content/7343-leading-edge-log...

[1] https://en.wikichip.org/wiki/10_nm_lithography_process

[2] https://en.wikichip.org/wiki/7_nm_lithography_process