Intern/Freelancer: ~80k p/ year --> Engineer/Consultant: ~150k p/year --> CTO/CEO: ~250k p/year --> post-acquisition or (better yet) profitable founder: $500k-$10M+ p/year.
Sample sizes get smaller and smaller as you go up the scale. To be fair, you're no longer "programmer", but "attorney" can mean so many things at this point, it's almost more like saying "working in tech industry".