I'd say in general, the value of an M.S./M.A. is far below that of a B.S./B.A. It's more valuable than had I gone and gotten an A.S./A.A. even though the A.S./A.A. would have been more work.
I can't say I regret getting it, because it checked some boxes for me that let me move up the corporate ladder without as much fuss. It's kind of like getting a "free" extra 2-3 years of work experience and tends to move you up a hair in seniority, but that's about it. I seem to get management tasks a little bit faster than my non-M.S./M.A. peers.
It seems to be that the next most valuable degree is a PhD, but with few exceptions, it's not nearly as valuable in industry as one might think. I'm not even sure if it's really worth it in terms of ROI, whereas I'm highly confident that a B.S./B.A. will generally earn you more than without. So in that case an M.S./M.A. is just a stepping stone towards that. And that makes the PhD even harder to justify.
The people I know who seem to do the best have both a PhD and and MBA, which aligns them well with executive and senior executive placement in high-tech industry. It doesn't really even seem to matter what the PhD is in. An alternative that also seems popular among executive recruiters is J.D. & M.B.A.