That's always been the biggest mystery to me: what are chip manufacturers doing differently with each of these "process nodes" that makes them able to do photolithography at slightly smaller scales, but with the scale only shrinking a little bit per five-year-interval?
Naively, I'd expect a process like photolithography to be mostly scale-invariant (you can lens a mask down to whatever size you like) down to a size where it hits a wall due to quantum effects. So when photolithography was invented, why didn't chips suddenly jump from 100um to 100nm scale?