ASMLs EUV machines are literally the most complex machine that mankind has ever built, which is why no other country, including the US, has yet been able to duplicate it. It's not just the machine itself, but a global supply chain of irreplaceable components such as focusing mirrors made by Zeiss to an incomprehensible level of accuracy - differences in surface height no more than the size of a hydrogen atom (or if you scaled the mirror up to the size of the country of Germany, then surface differences in height of 0.1mm).
Robots are useful to automate things, but they are zero help when trying to build tech like this that you are incapable of building in the first place.
The US has fallen way behind in manufacturing expertise, and no swarm of robots is going to help.