I believe the theoretical maximum yield for multi-patterning DUV at 5nm and 7nm is 30-40%
It's not economically sustainable/viable long term. China is only doing it because they've been forced to by the trade war Trump started against them in his first term (Biden didn't really back down either and now Trump 2 tried to ramp it up even higher). China is okay with such low yields because its supposed to be a temporary solution until they achieve domestic EUV tech.
If a process has a defect rate of x, the probability of a die having a defect is A*x. The limit is then the defect rate for a die with the surface area of a transistor, you cannot really get any better than this. But that’s not very useful if you want to extrapolate what the defect rate would be on an improved or cheaper process.