EUV was developed in a joint venture with the Department of Energy and ASML, Intel, etc called EUV Corp. It’s why the US can export control it.
From ASML:
"ASML’s extreme ultraviolet (EUV) light source was developed and is manufactured at its facility in San Diego, California. Acquired from the US firm Cymer in 2013, the R&D team here developed the laser-produced plasma (LPP) system that fires lasers at tin droplets 50,000 times per second to generate EUV light."
Not to mention the critical role of the US in its development. The core EUV light source was invented in San Diego!