Lots of chips have metal spins to fix errors. The blank areas of the chips are filled with filler cells but most of them are special "ECOFILLER" cells that are basically generic pairs of N/P transistors like a gate array. These can then be turned into any kind of cell just by using metal. They are a little slower but work fine.
I've worked at one huge company where they planned 3 full base layer mask sets and 1-2 metal spins for each full base layer set. This was when doing a chip on a brand new process node where you couldn't always trust the models the fab gave you so you wanted more post silicon characterization to recalibrate models.
Oh, this is fascinating.
The ECOFILLER gate array style cells are easier to use.
Then during the DRC check process in Calibre we run a check to make sure that the base layers stayed the same and only the metal layers changed. Since we have 18 metal layers in a leading edge node hopefully only metal layers 1 to 3 changed for the metal ECO so you only have to pay to make new versions of that.
A full mask set in 3nm can be over $30 million. Just a new set of metal masks is around $20 million.
A full mask run takes about 4 months in the fab. Normally you tell the fab to keep a few wafers after the base layers and don't manufacture the metal layers. Then when you do a metal respin they get those out of storage and save a month.
> Normally you tell the fab to keep a few wafers after the base layers and don't manufacture the metal layers.
Oh, I had no idea that was a thing.
Blocks are never 100% full. If it was then you would never be able to route the design. High utilization may be 70% but if a block has tons of IO then I've worked on blocks that are only 25% utilized. For various manufacturing and yield purposes the empty spaces need filler cells.
Sometimes we put in decoupling cap cells. But the ecofiller cells go in everywhere else.
About 25 years ago we were using spare gates that we had preplaced on the die.
About 5 years ago we started using spare gates preplaced and ALSO the ecofiller cells. The reason I was told was to save money because the ecofiller cells require some other mask layer to change. I think that was in the $500K range but it's still money.
In general I hate doing ECO's with the preplaced spare gates as it is manual and time consuming to find the best cells to use.