The big brain move is to try leap-frog the whole thing with XFEL. Smaller wavelength, way brighter source, no vaporized tin particulate, etc. It's a much bigger lift, new optics, new resists, etc. So a completely brand new supply-chain from scatch but with no competitors on that tech yet and low will for Western companies to try compete on it because they need to get money out of existing EUV tech first.
This is very similar IMO to Chinese auto manufacturing. Their ICE cars never really did meet the same standards as European or Japanese manufacturers despite JVs etc.
However EVs and green-tech are analagous to the XFEL path, they built from scratch and leapt over the competition that was happy to sit on it's existing profitable tech instead.