The Alpha architecture was 64-bit from the very beginning (though the amount of addressable virtual memory and physical memory depends on the processor implementation).
I think it goes something like:
- 2106x/EV4: 34-bit physical, 43-bit virtual
- 21164/EV5: 40-bit physical, 43-bit virtual
- 21264/EV6: 44-bit physical, 48-bit virtual
The EV6 is a bit quirky as it is 43-bit by default, but can use 48-bits when I_CTL<VA_48> or VA_CTL<VA_48> is set. (the distinction of the registers is for each access type, i.e: instruction fetch versus data load/store)
The 21364/EV7 likely has the same characteristics as EV6, but the hardware reference manual seems to have been lost to time...