The EUV-LLC was 100% financed by the private companies in the consortium, ASML being one.
"To access EUV technology, Intel in 1997 formed the EUV LLC, which entered into a cooperative R&D agreement (CRADA) with DOE. As part of this agreement, Intel and its partners would pay $250 million over three years to cover the direct salary costs of government researchers at the national labs and acquire equipment and materials for the labs, as well as cover the costs of its own researchers dedicated to the project. In return, the consortium would have exclusive rights to the technology in the EUV lithography field of use. At the time, it was the largest CRADA ever undertaken."
In return, the consortium would have exclusive rights to the technology in the EUV lithography field of use
https://issues.org/van_atta/