They have spare parts you'd bet, and I'd bet they have some SLA agreement with each customer where an engineer is basically on call nearby in case a single thing dosnt work or a random part breaks or needs servicing.
Asianometry did a great video on the cost of downtime when it comes to ASML device in any fab. While I am not directly in this field and can't speak to the accuracy of the numbers john gives, he does not seem one to just make stuff up as his quality of video production for niche topics is quite good.
Probably for the best though, KFAB had been discharging several tons of solvents, cleaning agents, and reagents per year into the surrounding area [for as long as it ran](https://enviro.epa.gov/facts/tri/ef-facilities/#/Release/640...)
https://enviro.epa.gov/facts/tri/ef-facilities/#/Release/640...
its nice to be aware of this but this is so fastly different from a critisism point of view that i don't think that matters.