You underestimate the sheer complexity of it. You’re talking $1B, I am talking a blank check. That’s probably 100s of different research teams, each with a $?B, whose “research” would have to industrialized.

Then there’s integration and SW. Not to mention performance, metrology, diagnostics.

Now you have to actually integrate these new tools into a new leading node process. This by itself takes years, assuming you have the tools. China does have existing Immersion process nodes, but still.

Even with unlimited resources, I claim China can’t have EUV within 10 years. Maybe not even 20.