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I'm curious what would be the best way to replicate an x/y (optionally z) system with 0.05mm or lower accuracy? Without sacrificing speed of course.

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Depends on how much power you need (speed times force, acceleration and deceleration...) and how much stiffness you need (can't bend?).

Also depends on how much travel you need. It is easier to get 50 micron accuracy over a total length of 100 micron compared to a total length of 1 meter.

Making things lightweight is crucial, because otherwise inertia will make your toolhead deviate from the planned trajectory at any corner.

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