More commonly, bulk micromachined MEMS devices are monocrystalline.
> and is very fragile at that
Normalizing for density, monocrystalline silicon is stronger than steel!
So's glass, and silicon's a lot like glass (very brittle)
You're right that fracture toughness is comparable, but that's not usually as relevant in a MEMS context: for one thing there's less potential for unanticipated collisions, but also crack propagation is significantly inhibited at microscopic length scales.
All the MEMS that are actually used in practice avoid this: they are effectively entirely flexural structures, nothing rubs against anything else, they just flex in place. This kind of structure can last almost indefinitely (especially since they're usually made of a single crystal, making the usual creep/cracking wear mechanisms mostly a non-issue)