TSMC says can make next generation chips without ASML's new machine

reuters.com

Super interesting, but the the article has no explanation. What technology is used instead?

ASML NA lithography from the current generation with upgrades? (most likely)

Nanoimprint lithography from Canon? (extremely unlikely)

> What technology is used instead?

“ASML's older tech may be more reliable and good enough” for TSMC’s next chip generations.

"High NA tools are expected to cost more than 350 million euros ($378 million) each, from 200 million euros from ASML's regular EUV machines."

The grammar in this article is strangely bad for Reuters