2024:  Nvidia's B100 TSMC 3nm (?)
  2024:  Intel Gaudi3  TSMC 5nm (*)
  2023:  AMD MI300X    TSMC 5nm/6nm 
  2022:  Nvidia H100   TSMC 4N
  2020   Nvidia A100   TSMC 7nm

(*): performance critical chiplets at least.