I recently got recommended the video "Imaging at ASML" [0] and it absolutely blew my mind. If you decide to watch it, don't ditch it before you see the animations of the light waves and the problems that need to be solved.
The core IP for EUV Lithography is still owned by the US DoE (LLNL, LBL, and Sandia), and they licensed it to Applied Materials a couple years ago. They even released an EUV Lithography etcher last year that doesn't compete with ASML's IP but complements and simplifies the process.
Applied Materials and ASML don't directly compete in the EUV Lithography space, but in a couple years there will be less dependence on ASML alone.
https://www.youtube.com/watch?v=EUOfNa8n6mQ&list=PLaLGh7vzNI...
The stuff you find on ebay is just amazing.