If you think this is cool, you should see the system responsible for moving the wafers between the tools.
In the industry, the robotic system that moves the lots through the factory is what makes all of the economics viable. If a human has to move wafers between tools manually, none of us would be using the devices we have today.
The AMHS is where all the magic comes together. It's really easy to get laser focused on one dimension, tool or metric, but that makes it hard to understand the entire game. Semiconductor mfg is all about a system of systems taken to the extreme and the robot that ties all the physical tools together is doing a ton of heavy lifting with regard to integration.