ASML have a defacto monopoly. These machines being this complicated is a giant plus for them.

edit: To give an example from another industry, Dave from EEVBlog has a nice teardown for a DLP projector from the upper price segment. https://www.youtube.com/watch?v=O3eGqjV9yG0

You can argue that an important design criteria building this was often the pricetag of the end product.