You joke but it does seem like we’re near the end of the line. We can go from 3 nm to 2 nm to 1 nm, but we can’t go negative nanometers. That’s it.
EDIT: for instance IMEC talks about "sub 1nm" process, that is 0.7nm (https://www.tomshardware.com/news/imec-reveals-sub-1nm-trans...)