There's one thing I can't understand in this story: if that's lawful interception, why Hetzner and Linode bothered to set up MitM interception with different LE certificate and key, rather than extract the TLS private key directly from the RAM and/or storage device of the VPS? Even if this is a physically dedicated server, they can extract the private key from the RAM by dumping the RAM contents after unscheduled reboot. Extraction of the private key isn't visible in CT logs, much more stealthier, practically undetectable.