> The technology behind EUV is quite simple on paper, the hard part is getting it to work reliably.
EUV machines are a terrible approach to the problem made to work through a huge amount of effort. Look at the size of those things. All to get a little burst of soft X-rays and focus it on a mask and wafer. With a light source that works by using lasers to vaporize a droplet of tin falling in vacuum. Creating an internal mess that has to be cleaned up.
For a decade, people in wafer fab hoped there would be some other way to do this. Small synchrotrons. X-ray lasers. E-beam machines. But those approaches all fizzled out. So what ought to be a physics experiment run occasionally was hammered into being a production technology.
Examples of a commercial technology that hard which went mainstream are rare. There was the image orthicon.[1] That's a TV camera tube. Previous technologies needed very bright light. Zworklin's iconoscope accumulated the image over an entire frame time, but photon to electron conversion was very inefficient. Farnsworth's image dissector had much more efficient photon to electron conversion, because it had a photomultiplier built into the tube, but only the light received from the pixel currently under the scanning beam contributed to the output - there was no full-frame accumulation.
So RCA developed the image orthicon, which combined both of those technologies. It was insanely complicated and expensive. The tube alone cost about US$10,000 in the 1950. Color required three tubes. The tubes required something like ten different power supplies, and control and alignment required hundreds of adjustments. Here's someone trying to restore one.[2] All those racks of equipment for one camera.
[1] https://en.wikipedia.org/wiki/Video_camera_tube#Image_orthic...
[2] http://earlytelevision.org/rca_tk41_restoration.html