> A lot of the research was funded by Intel and a couple of other US chip firms and was done in US national labs, which had the types of equipment and testing capabilities that were needed to actually make UV light at the requisite wavelength possible. But there was no US firm that could commercialize this equipment. Even though the science and technology was largely done in California. ASML was a company that already made older-generation lithography tools and had the capabilities to turn the science into a mass-manufactured device. That set ASML on the trajectory to where it is today: the only producer in the world of machine tools that can produce EUV light and use it to produce semiconductors.

https://www.theverge.com/23578430/chip-war-chris-miller-asml...