It looks like small piece of tin is where the magic begins [1]:
> An EUV system uses a high-energy laser that fires on a microscopic droplet of molten tin and turns it into plasma, emitting EUV light, which then is focused into a beam.
is the spectrum naturally pure, or is there some filtering/selection going on?
> The tricky thing with EUV light is that it’s absorbed by everything, even air. That’s why an EUV system has a large high-vacuum chamber in which the light can travel far enough to land on the wafer. The light is guided by a series of ultra-reflective mirrors
The system uses 1MW of power!
1. https://medium.com/@ASMLcompany/a-backgrounder-on-extreme-ul...