It's not less chemical intensive at all. Some aqueous processes have replaced more toxic ones. But dissolved copper and solvent waste makes up the majority of ever fabs waste stream. TSMC/Intel etc have made pretty big strides in zero landfill hazardous waste. It just gets recycled and used in other processes internally or by other companies.

I don't know what the Chinese fabs do, so I have no idea if pump their waste out into the environment.