Not in significant quantities. Another study also using Far-UV excimer lamps [1] measured levels of less than 0.005 ppm, which is far below the 0.05 ppm maximum allowed by the FDA for medical devices [2].

[1] https://www.nature.com/articles/s41598-018-21058-w [2] https://www.epa.gov/indoor-air-quality-iaq/ozone-generators-...

Yup, looks like

“ The Ultraviolet spectrum has four wavelengths, (see illustration below), labeled: UV-A (400 to 315 nm); UV-B (315 to 280 nm); very high energy and destructive UV-C (280 to 200 nm); and Vacuum UV (200 to 100 nm). Only this last wavelength, Vacuum UV, is capable of producing ozone.”

https://uvresources.com/the-ultraviolet-germicidal-irradiati...

Don’t know much about it though.