Breaking taps has a cool video on how the alignment flexures work: https://www.youtube.com/watch?v=5MxH1sfJLBQ
The video references the public documentation @ https://www.esmats.eu/amspapers/pastpapers/pdfs/2006/warden..... They weigh 665 grams (1.47lbs), have a range of 21mm (.826 inches) and a 7.7 nanometre (0.00000030315 inch) step. They work at temperatures down to -253C (-423.6F).
The cryocooler and these flexures have me seriously considering going back to school for a mechanical engineering/materials science degree.
Day to day, my software work looks outright amateurish compared to that. However, the process to develop these sorts of instruments is extremely boring (mostly process following).