If you are running a serious fab you already have AMAT equipment anyway and there's probably good reasons to get the industry standard AMAT MES software.
Realistically, this software will probably continue not to exist because there are not many target customers in this "mini-fab" segment, and they are uniformly poor. That's not a great outlook for sales. If your software is any good, you want to market to the same segment AMAT does and go for the multi-million $ licensing fees.
[1] https://www.ibm.com/products/siview [2] https://ims.inficon.com/ [3] https://kontron-ais.com/en/products/factory-automation/fabea... [4] https://www.peergroup.com/expertise/factories/factory-automa...
I'd bet there is a reasonable market for a good SAAS MES, or at least parts of a total solution. I imagine that you would want at last part of the solution to be on-prem, to avoid shuttling the large amounts of data that process tools are producing offsite.
SECS (SEMI Equipment Communications Standard) and GEM (Generic Model for Communications and Control of Manufacturing Equipment) will be of particular interest.
https://www.semi.org/en/industry-groups/smart-manufacturing/...